Seventh-order wavefront modulation with a gravity-neutral optofluidic deformable phase plate

A 63-electrode optofluidic refractive wavefront modulator enabling spatial frequency correction up to the seventh radial Zernike order, highest order ever achieved with a dynamic modulator, is presented. The designed so that aberration performance nearly identical in both horizontal and vertical orientations, virtually eliminating gravity-induced parasitic surface deformations typical for devices. With 55 of its electrodes located within 1-cm clear pupil, offers versatility continuous face-sheet deformable mirrors compact, high efficiency, transmissive device. Using fluidic interfacing method based on wafer-level 3D micro-structuring glass, only 0.86-mm-thick, facilitating cascading multiple modulators close proximity. We demonstrate bi-directional stroke more than 13 ?, replications mode shapes fidelity, representing significant leap ultra-miniaturized modulators.